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Figure 7
Vertical cuts through the second diffraction order of the GISAXS patterns collected at different photon energies (measured data on the left, fitted model on the right). The measurements for surrounded field 1 (line width w = 45 nm, top) and for surrounded field 2 (w = 55 nm, bottom) are shown. The dashed lines show the FWHM of the slit diffraction calculated using equation (7)[link], which indicates the window of reciprocal space measured at the respective photon energy. Since detector quantum efficiency and photon flux change with the photon energy, absolute intensities are not comparable between different photon energies.

IUCrJ
Volume 4| Part 4| July 2017| Pages 431-438
ISSN: 2052-2525
https://doi.org/10.1107/S2052252517006297