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Figure 16
Experimental results, Young's modulus of thin films: B4C of 10 nm, 20 nm, 50 nm; Pd of 50 nm, 100 nm, 200 nm; Cr of 50 nm, 100 nm, 200 nm. |
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Figure 16
Experimental results, Young's modulus of thin films: B4C of 10 nm, 20 nm, 50 nm; Pd of 50 nm, 100 nm, 200 nm; Cr of 50 nm, 100 nm, 200 nm. |