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Figure 5
SEM image depicting the patterning resolution of the X-ray writer developed. The spot size was estimated to be 21 and 25 nm in the vertical and horizontal directions, respectively.

Journal logoJOURNAL OF
SYNCHROTRON
RADIATION
ISSN: 1600-5775
Volume 22| Part 3| May 2015| Pages 781-785
https://doi.org/10.1107/S1600577515003306
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