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Figure 8
Beam profiles computed for 13 nm wavelength in the near-waist region (±100 mm around the focal plane) by numerical propagation of the Hartmann data before (top) and after (bottom) the alignment procedure. |
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Figure 8
Beam profiles computed for 13 nm wavelength in the near-waist region (±100 mm around the focal plane) by numerical propagation of the Hartmann data before (top) and after (bottom) the alignment procedure. |