|
Figure 7
Detailed EUV reflectivity scans inside and outside the l1n9 spots: (a) for Ru an angle of incidence scan at fixed wavelength of 13.5 nm and (b) for Mo/Si a wavelength scan at a fixed angle of incidence of 73.75°. |
|
Figure 7
Detailed EUV reflectivity scans inside and outside the l1n9 spots: (a) for Ru an angle of incidence scan at fixed wavelength of 13.5 nm and (b) for Mo/Si a wavelength scan at a fixed angle of incidence of 73.75°. |